The following two points illustrate the advantages of hMPL. Firstly, through narrowing the existing spectral width, contrast improves and the process window widens. Secondly, as the spectral width can be varied, it is possible to adjust contrast differences between exposure devices. For semiconductor manufacturing for the IoT, this is an effective method when old and new exposure equipment is used in combination. With these advantages, hMPL improves the margin for the exposure process, contributing to process optimization and to improvements in chip productivity.
hMPL will be installed as standard on the GT65A* scheduled for shipment at the end of 2017.
Katsumi Uranaka, President & CEO of Gigaphoton commented, “Spectral Width Control Technology, (hMPL) was developed to meet the demand for semiconductors, which is expected to increase still further with the growth of an IoT-based society. We will continue to contribute to the semiconductor industry, supporting our customers with state-of-the-art technology. ”
*A news release concerning the GT65A is available at http://www.gigaphoton.com/en/news/4938
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Since it was founded in 2000, Gigaphoton has delivered valuable solutions to semiconductor manufacturers throughout the world as a light source supplier. In every stage from R&D to manufacture, sales, and maintenance services, Gigaphoton is committed to providing world-class support delivered from the perspective of everyday users. For more information please visit Welcome to Gigaphoton.