Andrew Chambers, senior product manager, and Ma Zhen, applications manager China, will present the poster, “Managing Safety and Cost in Dielectric CVD Process Tool Exhausts – Future Sub-fab Integration Trends.” In their booth, Edwards will also be demonstrating the science of detecting leaks and discuss managing condensable gases in the exhaust line. Additionally, visitors at the Edwards booth can try out the “Molecule Blaster,” an immersive virtual reality experience that illustrates the abatement of greenhouse gases to reduce their impact on the environment; this also demonstrates how virtual reality can help training of service personnel.
“Edwards customers truly benefit from ‘Global Knowledge, Locally Applied,’ with more than 4,000 employees world-wide and over 300 across China,” said Xu. “It is the broad experience and deep application knowledge of our tightly integrated network of global employees that allows us to develop industry-wide best-known-methods and then adapt them to the particular needs of each customer’s process, ensuring their safety, conserving the environment and helping to reduce risks.”
Visit Edwards (Hall N1 #1601) to learn more about innovative sub-fab solutions and value-added services. Further information about Edwards can be found at www.edwardsvacuum.com.
About Edwards
Edwards is a leading developer and manufacturer of sophisticated vacuum products, exhaust management systems and related value-added services. Edwards solutions are integral to manufacturing processes for semiconductors, flat panel displays, LEDs and solar cells. They are also used within an increasingly diverse range of industrial processes including power, glass and other coating applications; steel and other metallurgy; pharmaceutical and chemical; and for scientific instruments in a wide range of R&D applications.
Edwards has over 4,000 employees worldwide engaged in the design, manufacture and support of high technology vacuum and exhaust management equipment. Edwards has state-of-the-art manufacturing facilities in Europe, Asia and North America.