TOKYO--(BUSINESS WIRE)--JEOL Ltd. (TOKYO:6951) (www.jeol.com) (President & COO Izumi Oi) announces the release of a new Schottky field emission scanning electron microscope, JSM-F100 in August 2019.
https://www.jeol.co.jp/en/news/detail/20190804.3456.html
Background
Scanning electron microscopes(SEMs) are used in various fields; nanotechnology, metals, semiconductors, ceramics, medicine, and biology. With application expansion, SEM users are in need of fast high-quality data acquisition and simple compositional information confirmation with seamless operation.
The JSM-F100 incorporates our highly regarded In-lens Schottky Plus FE electron gun and "Neo Engine"(electron optical control system) as well as a new GUI "SEM Center" and an innovative "LIVE-AI(Live Image Visual Enhancer-Artificial Intelligence) filter". This enables an optimal combination of high-spatial-resolution imaging and operability. Furthermore, a standard JEOL energy dispersive X-ray spectrometer(EDS) is fully integrated within "SEM Center" for seamless acquisition from images to elemental analysis results. The JSM-F100 achieves superb work efficiency, 50% or higher than that of our previous JSM-7000 series, realizing dramatically-increased high throughput.
Features
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In-lens Schottky Plus FE electron gun
Enhanced integration of the electron gun and low-aberration condenser lens provides higher brightness. Ample probe current at low accelerating voltage supports various capabilities from high-resolution imaging to high-speed elemental mapping. -
Hybrid Lens(HL)
The Hybrid Lens(HL), combining the electrostatic and magnetic field lens, supports high-spatial-resolution imaging and analysis of various specimens. -
Neo Engine(New Electron Optical Engine)
Neo Engine, a cutting-edge electron optical control system, significantly improves the precision of automatic functions and operability. -
New function of "SEM Center"
A new operation GUI "SEM Center" fully integrates SEM imaging and EDS analysis and provides next-generation operability and high-resolution images obtained with FE-SEM. -
New "Zeromag" function
"Zeromag", incorporated for seamless transition from optical to SEM imaging, makes it easy to locate the target specimen area. -
New LIVE-AI filter*
Utilizing the AI(artificial intelligence) capability, LIVE-AI filter is incorporated for a higher quality of live images. Unlike image integration processing, this new filter displays a seamless moving live image with no residual image and is very effective for quickly searching observation areas, focusing, and stigmator adjustment.
*optional
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Specifications |
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Resolution(1 kV) |
1.3 nm |
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Resolution(20 kV) |
0.9 nm |
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Accelerating voltage |
0.01 to 30 kV |
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Standard detectors |
Upper Electron Detector(UED), Secondary Electron Detector(SED) |
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Electron gun |
In-lens Schottky Plus FE electron gun |
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Probe current |
A few pA to 300 nA(30 kV) |
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Objective lens |
Hybrid Lens(HL) |
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Specimen stage |
Full eucentric goniometer stage |
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Specimen movement |
X: 70 mm, Y: 50 mm, Z: 2 to 41 mm |
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EDS detector |
Energy resolution: 133 eV or less |
Annual unit sales target
60 units/year
JEOL Ltd.
3-1-2, Musashino, Akishima, Tokyo, 196-8558, Japan
Izumi Oi, President & COO
(Stock code:6951, Tokyo Stock Exchange First Section)
www.jeol.com
